Used LAM RESEARCH 490 / 590 #293817052 for sale

LAM RESEARCH 490 etcher/asher is a compact and versatile plasma etching and ashing equipment designed for use in research and development or semiconductor production. It features a multi-chamber design that allows for the simultaneous processing of different materials, such as semiconductor wafers, substrates, and organics. The 490 includes an array of advanced etching and ashing processes that use high frequency plasma and a chemically-assisted technique to achieve high etch selectivity. The unit is controlled by a PLC system and features a small footprint, making it ideal for small to medium size laboratories. The 490 is a dual chamber unit with a main reaction chamber and an auxiliary chamber located above it. The main chamber is used for etching and ashing processes involving up to twelve 2" wafers. It also accommodates samples such as substrates and organics using a toploading quartz boat. The machine also includes a viewing port and plasma spectroscopy port to monitor etch processes. LAM RESEARCH 490 is designed to offer high-precision etching and ashing capabilities with minimal environmental impact compared to other cleaning systems. Additionally, process optimization can be carried out efficiently with the help of the tool's extensive supporting software. The process software allows setting up the process parameters and controlling the etching and ashing processes. Its advanced diagnosis function also makes it easy to identify any possible issues with the asset and address them quickly. The model is also equipped with advanced safety features, such as an over pressure alarm equipment, temperature controllers, and active gas and chemistry monitoring. In addition, the 490 features ICED, a self-contained diagnostics system that helps identify and diagnose process issues, allowing for quick resolution and minimizing downtime. Overall, LAM RESEARCH 490 is an ideal etcher/asher for research and development, semiconductor production, and other advanced cleaning applications. It offers efficient etching and ashing processes, as well as extensive process optimization software. Its advanced safety features ensure that the unit operates safely and with minimal environmental impact.