Used LAM RESEARCH 490 / 590 #9119465 for sale

LAM RESEARCH 490 / 590 is an advanced etcher/asher equipment designed for semiconductor technology. It provides innovative solutions for precise etching, ashing and annealing processes. It is designed to etch and anneal extremely precise trenches, contact holes, micro-viasand via-holes. It also supports advanced trench, copper and dielectric etch processes. 490 / 590 models use the GEMINI® process control, a cutting-edge technology developed specifically for this advanced etcher/asher system. GEMINI® is an integrated software package that achieves superior process functionality and predictable results. It helps to optimize the unit performance, assuring that each etch or anneal job is completed to specifications. LAM RESEARCH 490 / 590 is designed to be a low-cost, cost-effective etcher/asher for semiconductor manufacturing. It can safely handle up to 5" wafers and with its automated loading sequence, it can minimize wafer handling and maximize process throughput. It is manufactured with advanced clean-room technology, with high-efficiency nitrogen and cometary gas diffusion systems that prevent contaminations and provide a clean process environment. 490 / 590 uses advanced etching technology with a wide range of selectable process settings to provide superior results. Gas flow, pressure, bias and temperature are all adjustable and monitored. These settings enable the optimization of each etching process, providing the best results for a variety of applications. LAM RESEARCH 490 / 590 offers flexibility to the end user and is capable of being operated in different modes. The "standard mode" is best when producing multiple similarly sized and shaped etches, while the "step mode" is ideal for more precise etching jobs. In addition, 490 / 590 supports advanced safety features, such as gas shut off sensors, power management systems and automated door locking systems. Furthermore, the machine has a high-efficiency exhaust tool which prevents process particles from entering the controlled environment. To summarize, LAM RESEARCH 490 / 590 is a highly advanced etcher/asher asset. It uses GEMINI® process control, a sophisticated software package, and supports up to 5" wafers. It is capable of etching and annealing extremely precise trenches, contact holes, micro-vias and via-holes with excellent results. Additionally, it offers a wide range of process settings and supports advanced safety features. All in all, 490 / 590 is an excellent choice for semiconductor etch and annealing applications.