Used LAM RESEARCH 490 / 590 #9145832 for sale

LAM RESEARCH 490 / 590 etchers / ashers are vacuum chambers designed for use in the production of semiconductor devices. They are equipped with high-performance electron beam guns, capable of producing sub-micron patterns in a variety of photoresist materials. The systems are capable of etching patterns into wafers at speeds up to 500mm per second, and can produce pattern sizes ranging from 0.01 to 3.0 microns in feature size. 490 / 590 series also offers advanced plasma etching capabilities, with advanced planarization and patterning processes. The chambers are highly configurable, with a number of options for optimizing the etch process to specific device requirements. The plasma source can be adjusted to control the ion flux and the ion energy for etching shapes with better edge definition and selectivity. The chamber has a number of safety features to protect the user and avoid exposing the wafers to damaging conditions. LAM RESEARCH 490 / 590 has a robust contouring equipment to accurately control depth and profile of etch features, as well as to reduce wafer damage during processing. The system can be optically adjusted to provide a uniform etch across the entire wafer. The vacuum chamber can be configured to allow etching of multiple layers simultaneously, enabling faster throughput times. 490 / 590 is designed to be compatible with a variety of wet processing systems, and can be synchronized with other systems in the fabrication sequence. The unit is equipped with an advanced automation machine to enable easy integration into production lines. The systems are designed to meet the most stringent cleanliness standards, ensuring that the wafers remain defect-free throughout the fabrication process. LAM RESEARCH 490 / 590 series is also compatible with a wide range of precursors and other materials for post-etch processes. 490 / 590 is the ideal solution for precision etching applications across a wide range of industries, including semiconductor, medical device, and MEMS device manufacturing. The etcher / asher is built for speed and accuracy, and its robust design ensures that it provides consistent results for years to come.