Used LAM RESEARCH 490 #199861 for sale

LAM RESEARCH 490 is an etcher/asher used in semiconductor device fabrication. This equipment features a low-energy, inductively coupled plasma (ICP) source with a specialized gas delivery system that enables process geometries as small as 0.25 microns. 490 is designed for high-precision etching, with high process throughput and yield. The etching process of LAM RESEARCH 490 unit is performed by a parallel-plate or rotating-source ICP, which allows for precise control of the process variables. The source power is adjustable to accommodate different materials. The gas delivery machine on 490 is composed of up to five gas lines, allowing for control over the mix of gases used in the plasma process. The gas mix is closely monitored in order to ensure an optimal etching process. The rotatable-source configuration on LAM RESEARCH 490 also features a rotary shutter that is used to decrease the amount of ion bombardment when etching delicate structures, such as strained silicon. Additionally, 490 tool can use a variety of chemistry mixes, providing flexibility in the etching process. This can help optimize service life and cost control, while still providing reliable performance. LAM RESEARCH 490 asset also features advanced software, allowing the user to configure process recipes to meet the specific needs of the device. In addition, 490 model offers excellent repeatability, with a storage capacity of up to 1,000 recipes. Its precision clamping equipment ensures that wafers do not warp during processing, and its programmable gas distribution box (PDB) improves uniformity of the etching process. Plus, LAM RESEARCH 490's automated end-point detection system eliminates guesswork and provides an accurate result every time. 490 etcher/asher is an advanced unit designed for fast, consistent, and accurate etching and ashing of semiconductor devices for the fabrication of cutting-edge technology. Its high capacity, precision, and repeatability set it apart from other systems, creating a reliable solution for chip manufacturing.