Used LAM RESEARCH 490 #293604249 for sale

LAM RESEARCH 490 is a Plasma Enhanced Chemical Vapor Deposition (PECVD)-equipped Asher/Etcher engineered for higher throughput, flexibility and reliability. This robust processing tool features a 267 mm x 267 mm wafer size, 1.6 mbar base pressure, and a 7kW Load Lock/High Capacity Load Lock/Process Chamber. The high-speed thermal process is configured to operate between 30°C and 250°C, with up to 13 programmable sets of recipes and process parameters with 4 deposition heads and 5 etch chambers. 490 is built with advanced technology to ensure consistent, repeatable processing results. Its auto-slope feature minimizes misplacement of wafers in the chamber during thermal cycling, and its redesigned wafer handling system makes wafer retrieval easier for operators. The etch/asher also offers a multi-frequency RF substrate power supply for sputter/etch deposition and etch applications, as well as an advanced harmonic impedance source matching technology for greater processing control. LAM RESEARCH 490 also has flexible design capabilities that enable customers to customize their process recipe for specific substrate type, application, quality specifications and deposition requirements. An integrated heater and integrated cooling ports provide uniform heating and cooling, respectively, for improved process uniformity. 490 also offers advanced turret management to simplify operation, such as Multi-turret and Macrobatch capabilities as well as advanced system monitoring and diagnosis capabilities. Furthermore, this PECVD-equipped asher/etcher leverages an advanced web-based GUI to reduce user interaction, set up and configuration time. It features an intuitive display that simplifies programming and reduces the complexity of manual operations. The design also contributes to improved system stability and minimized downtime. Overall, LAM RESEARCH 490 is an efficient and robust PECVD-equipped asher/etcher tool engineered to deliver superior processing with predictable and repeatable results. Its advanced technological features enable customers to reach the highest levels of throughput, flexibility and reliability.