Used LAM RESEARCH 490 #293605750 for sale

LAM RESEARCH 490 is a robust asher/ etcher equipment with a number of features designed to simplify the process of etching wafers with high precision and repeatability. The system comes with a rotatable and inverted pedestal table, enabling easy access to both sides of the wafer for optimal etching precision. The unit moreover is able to adjust for wafer height differences, ensuring a consistent etching pattern over the entire surface of the wafer. 490 includes a sophisticated temperature-controlling algorithm to ensure an optimal etching temperature and an automated nitrogen handling machine for improved control of the reaction atmosphere. The combination of these two elements allows for improved quality and yields, as well as longer tool lifetime and stability. LAM RESEARCH 490 also contains a number of user-friendly features including a graphical user interface (GUI) for efficient wafer tracking and program parameter setup, an alignment tool for wafer-to-platen contact during processing, a robotic wafer transfer asset which allows for automatic transfer and loading of wafers in and out of the etching chamber, and a dedicated bar code reader for added convenience. 490 also comes with a powerful vacuum model which is capable of evacuating the processing chamber up to 24 mbar in just over 90 seconds, helping to ensure the needed process environment is achieved quickly and accurately. Additionally, LAM RESEARCH 490 includes a range of version-controlled software packages which helps to streamline many of the etching process steps for improved efficiency. In summary, 490 is a robust asher/ etcher equipment which offers several features that help to improve yield, increase process repeatability and accuracy, and minimize time consuming tasks such as wafer transfer and etching chamber evacuation. This system is a reliable and cost-effective alternative for many etching applications.