Used LAM RESEARCH 490 #293657950 for sale

LAM RESEARCH 490 is an etcher / asher designed to facilitate efficient and cost effective semiconductor device fabrication. 490 is designed for production and research applications, providing high throughput and repeatable process control, which can be tailored to meet specific needs. The process chamber is cylindrical with two stages, consisting of a lower heating mechanism and an upper-level reaction chamber. An automated wafer transfer equipment facilitates wafer transport between the two chambers. The lower chamber has a quartz susceptor coupled to a gas handling system that allows for controlled delivery of process gases. The gases are delivered through a multi-gas manifold and can be used to create a plasma. The upper-level reaction chamber contains a cool-down section for ashing operations. The LAM LAM RESEARCH 490 is designed for single wafer operation and can be configured with various process-specific components, including wafer handlers, gas source, base pressure gauges, optical emission spectroscopy, chamber pressure gauges, deposition head or shower, process gaskets, and on-board diagnostics. It can also be equipped with an exhaust scrubber, plus a pressure control loop, and additional safety features. The LAM 490 is designed to deliver accurate etching and ashing of silicon semiconductor substrates with high-quality features and tight control over process parameters. It allows for repeatable quality assurance and optimization that can be tailored to specific customer requirements. A self-monitoring capability is also available through the control unit, which can be used to monitor the quality of the etched or ashed material. The LAM LAM RESEARCH 490 can also be used for low-alkaline ashing, which is an innovative etching process that utilizes the combined effects of thermal and plasma to produce high-performance etching results with minimal residual contamination. It can also be used to have low-alkaline metal etching, where the metal is embedded in the plasma, reducing contamination and achieving repeatable etching results. The LAM 490 etcher / asher is a robust machine for etching and ashing a variety of semiconductor devices. The capabilities of the tool, combined with its versatile features, make it an excellent choice for applications ranging from process development to device manufacture.