Used LAM RESEARCH 490 #83458 for sale

LAM RESEARCH 490 is an advanced, Heavy Duty Reactive Ion Etching (RIE) equipment used for the etching, cleaning, and other surface treatments of semiconductor wafers. This system utilizes state-of-the-art hardware and software to provide highly reliable and repeatable results across a variety of materials, from silicon to dielectrics and metals to compound semiconductors. 490 comes standard with a 0.1 um resolution laser interferometer and optical profilometer to ensure a precise etch profile. The plasma is created in the isolated chamber by applying a high-energy electric field to a chemically reactive gas, or by heating a plasma generating gas to a virtual "avalanche." The etch recipes can be customized to match specific needs. LAM RESEARCH 490 also utilizes a suspended substrate holder and supporting structures, enabling a wide range of etching processes to be performed on a variety of materials. In addition, 490 is equipped with pressure control systems that can accommodate any process requirements. LAM RESEARCH 490 is capable of producing very high aspect ratios for etching with depths ranging from 0.05 - 1 um. It also features a low loadpoint reactant control unit (LLRC) which allows for precise control over reactant fluxes and uniformity across the substrate. Ions can be selectively deposited on the substrate, reducing the removal of unwanted material. 490 features a patented radio-frequency inductively coupled plasma (RFICP) source. This allows for in-situ plasma diagnostics, with pulse modulated spectroscopy and emission imaging of the plasma. This capability is crucial for analyzing etching processes in order to optimize etch process conditions and improve throughput. LAM RESEARCH 490 has several options to reduce co-deposition of critical material and eliminates any potential of backwetting. This is a major cost savings when running large batches of substrates. 490 uses a low-vacuum exhaust to ensure complete evacuation of the reaction chamber, leaving no trace of by-products or reaction products. LAM RESEARCH 490 also features an advanced safety machine, with built in redundancies to ensure an uninterrupted working environment. 490 is certified for CE and CSA control compliance, ensuring that it meets the highest safety standards and is able to be used in any environment. Overall, LAM RESEARCH 490 is an essential tool in the semiconductor production process. Its advanced technology yields precise and repeatable results, and its safety systems go above and beyond the industry standards. 490 is the ideal choice for any etching or cleaning requirements in the semiconductor industry.