Used LAM RESEARCH 490 #9145865 for sale

Manufacturer
LAM RESEARCH
Model
490
ID: 9145865
Wafer Size: 6"
Etcher, 6".
LAM RESEARCH 490 is an advanced dry etcher/asher used in semiconductor manufacturing to produce highly accurate and intricate features on a wide range of device architectures. This equipment is capable of etching into materials such as metal, silicon, and polyimide with a wide variety of chemistries. It incorporates a unique solid-state plasma source providing superior etching control and high process repeatability. The system is designed for optimal performance in production processing of wafers of up to 200 mm diameter. It is compact, has a long track record of undergoing minimal maintenance, and requires minimal operator attention. This unit is used to produce devices with high precision and repeatability through advanced dry etch processing. 490 features Descum, a unique plasma source technology. Descum technology reduces the risk of contamination of semiconductor wafers by improving selectivity and increasing the quality of the etch by eliminating micro-contamination. This technology is ideal for etching in a cleanroom environment, as it eliminates volatile organic compounds, resulting in a clean, environmentally friendly etching process. The machine offers customer-defined recipe programming and control, consisting of preset user-defined steps to ensure a fast, reliable, and repeatable process. Advanced process control features enable the user to interface to numerous devices from the factory floor. This tool also offers sophisticated adaptive contact measurement (ACM) capabilities, providing a total process control solution with automatic compensation for temperature, pressure, and sample variability. LAM RESEARCH 490 is a highly reliable and accurate asset. It is designed to be compatible with a wide range of materials and chemistries and provides a low-cost alternative to wet etching. Overall, this model is an excellent choice for semiconductor fabrication and device-level applications for producing intricate designs on materials of all types.
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