Used LAM RESEARCH 490 #9226284 for sale

LAM RESEARCH 490 is a wet etcher / asher designed to provide high-precision pattern transfer and etching capabilities in the semiconductor production process. It offers both fast cycle times and repeatable process results, allowing chip designers to produce small, complex integrated circuits with high reliability. 490 has a large liquid resist and etching chamber that can accommodate 4-inch wafers or up to 8-inch wafers in its mini-chamber. It features an automated real-time liquid level monitoring field (Auto-LVM) and a resistant material management equipment (RAM) that ensures precise etching of each layer. Its top-loading loadlock includes up to ten process recipes and a clean air curtain for chip production environments. Additionally, it offers tight process control for optimal pattern transfer, precise uniform etching and defect reduction. The system comes with a wafer-handling robot, precision-tempered venturi-based etch source, and a laminar flow gas distribution unit to ensure consistent focus and etch rate uniformity. It also includes an automated water rinse and clean loadlock for fast transfer and a heated loadlock for faster-equilibration time to improve throughput. LAM RESEARCH 490 features advanced software controls and a user-friendly graphical operator interface with a custom-designed alarm indication. It provides users with an automated tool qualification machine with an offline optimization feature and an in-situ OEE Monitor to monitor cycle time and defect rate. Additionally, an extensive process database enables fast, repeatable operation. 490 is an all-in-one etch/etch-asher tool designed for high-precision, repeatable results. It is suitable for use in both small and large-scale semiconductor fabrication processes, providing a cost-effective solution for a variety of process needs.