Used LAM RESEARCH 490 #9226287 for sale

LAM RESEARCH 490
Manufacturer
LAM RESEARCH
Model
490
ID: 9226287
Wafer Size: 6"
Vintage: 1987
Etcher, 6" 1987 vintage.
LAM RESEARCH 490 (also known as an etcher/asher) is a highly sophisticated and precise piece of equipment used to etch, or "get rid" of, material in the semiconductor process. It is used in the etch chambers of semiconductor manufacturing machines. This equipment is equipped with a wet-etch alicarbonate etch chemistry, which works to etch and remove the active layer of material from the semiconductor surface at very high temperatures. 490 is designed to etch specifically designed features into the semiconductor wafers that make up most semiconductor chips. It relies on its variety of features to etch these features at the precise necessary widths, depths and angles. The system comes with Least Action Mode (LAM) technology, a powerful and precise computer control unit that allows for optimal control of the etching process. The machine also features a rotating cathode shield and automated chamber cleaning, special gas flow controllers and turbine pump systems, and a temperature-controlled environment. This combination of features allows for precise etching of the semiconductor structures and general uniformity across different batches. To ensure the accuracy and precision of the etching process, LAM RESEARCH 490 is equipped with a precise lateral control tool that allows etching in up to nine (9) different positions of the wafer with nanometer-level accuracy. It has a high etch rate, precise process control, and is capable of handling large quantities of wafers with as many as 25 wafers per minute. The asset also features an in-situ monitor that allows users to get real-time process data. The model is easy to use and operate, and easy-to-understand operating manuals are available for users. 490 provides a reliable and precise etching machine for the production of devices in the semiconductor industry.
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