Used LAM RESEARCH 490 #9244799 for sale

LAM RESEARCH 490 is an etcher/asher that offers advanced features for high-speed performance and greater process control. Utilizing linear vertical etching/ashing technology, this etcher/asher offers the ultimate in semiconductor processing performance and process control. 490 consists of two distinct chambers. The etching chamber offers a vacuum-based process environment, while the ashing chamber offers an atmosphere-based process environment. The etcher/asher also comes equipped with a four-frame linear stage, providing a larger sample area than traditional two-frame models. The etching chamber of LAM RESEARCH 490 is equipped with an RF and microwave source, allowing a wide range of etching and annealing techniques such as dry etching, wet etching, and post-etch treatment. Mobile and stationary substrates can be loaded into the etching chamber, providing a wide range of substrate and feature sizes. The etching chamber is also capable of pellicle-free operation, and includes a quartz showerhead for uniform sample etching. The ashing chamber of 490 utilizes quartz box-style plasma guns for higher volume production. This chamber is also equipped with a load lock and transfer system for efficient loading and unloading of substrates. Both chambers also offer closed-loop control of flow, pressure, and temperature, as well as endpoint detection capabilities. LAM RESEARCH 490 also provides additional advanced features, such as a range of precision cleaning processes, oxide liftoff capabilities, and process cassette system. This etcher/asher is designed for optimal utilization of processing gases, with through-wall gas distribution and dual-wall gas lines that maximize gas delivery efficiency. In addition, this etch/asher is equipped with advanced automation, providing a wide variety of process recipes to accommodate different application requirements. 490 is a powerful and reliable etcher/asher that offers high-performance, process control and accuracy. With its wide range of etching and ashing techniques, plasma guns, and forward-looking automation, LAM RESEARCH 490 is the ideal solution for a variety of semiconductor processing needs.