Used LAM RESEARCH 490 #9399666 for sale

LAM RESEARCH 490 is an advanced etcher/asher equipment designed for high-volume production with fast cycle times and increased throughput. The system is ideal for high-precision through-thickness etching or ashing. Its direct-drive high-speed generation motor provides excellent repeatability, throughput and yield. 490 is an extremely fast and reliable unit configured to minimize downtime and maximize performance. LAM RESEARCH 490 utilizes plasma etching/ashing technology, utilizing a plasma chamber and quartz or ceramic etch/ash masks, that is ideal for applications like DRAM ILD etch or MEMS Type I etch. Its open frame design ensures optimized tool access, with a built in aluminum channel for fast and flexible tool-to-wafer platen board exchange. 490 is designed for high-volume production and its advanced substrate handling features such as sub-chamber load/unload, substrate transfer arm, and automatic masking make it an ideal solution for increased operational productivity. LAM RESEARCH 490 also features an advanced process monitoring machine, a powerful vacuum tool and an automated plasma tuning algorithm that helps ensure a consistent etch/ash quality. In addition, the asset is designed for maximum repeatability, with a rapid platen board exchange and a wide range of substrate sizes and shapes. For uniform, high-precision etching or ashing of the most challenging substrates, 490 etcher/asher is the ideal choice. Featuring constant plasma parameters, improved uniformity and increased throughput, LAM RESEARCH 490 is an ideal choice for tough etch or ash jobs.