Used LAM RESEARCH 490B #293829120 for sale

Manufacturer
LAM RESEARCH
Model
490B
ID: 293829120
Etcher.
LAM RESEARCH 490B is a wet-chemical etching equipment designed to fabricate high-precision micro-structures on silicon and glass substrates. It features an active drying station that helps to prevent water accumulation and sediment contamination caused by evaporative and direct contact of liquid solutions during the etching process. The system is composed of a control cabinet, an etching tank, and a dosing pump. The control cabinet contains an LCD display and a numbered symbol keypad for programming the etch process. The etching tank is a stainless steel container with a tapered bottom to ensure proper etchant removal. The dosing pump, which is connected to the etching tank, is used to dispense a regulated amount of etchant solution. LAM RESEARCH 490 / B is capable of etching at temperatures from -40° to 80°C, and is able to process substrates up to 200mm. The unit also includes a 7µm precision nozzle, which helps to ensure uniform etching across a surface, as well as an automated sonication machine for post-etch cleaning. 490B is also equipped with an Advanced Plasma Systems Technology (APST) module, which helps to further improve etch uniformity, reduces etch rate variation, and is capable of controlling the etching time to within milliseconds. Additionally, 490 / B features multiple safety features such as pressure relief valve, emergency stop button, audible alarm and temperature sensors to maintain optimal etching conditions and ensure operator safety. The LAM LAM RESEARCH 490B etching tool is an ideal choice for manufacturing high-precision micro-structures on polymer, silicon and glass substrates.
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