Used LAM RESEARCH 490B #9112925 for sale

LAM RESEARCH 490B
Manufacturer
LAM RESEARCH
Model
490B
ID: 9112925
Wafer Size: 6"
Dry etcher, 6".
LAM RESEARCH 490B is a plasma etcher/asher intended for use in research, development, and production of high performance electronics. This model is ideal for applications that require smooth, even etches on substrates of various shapes, sizes, and materials. It features an orthogonal, adjustable-by-voltage, non-resonant, all-metal high frequency ion source, which produces high speed and uniform etch processes. LAM RESEARCH 490 / B also features an automatic substrate alignment system for faster substrate loading time, as well as a wide range of control parameters for increased control over the process. 490B is designed to be easily configured and operated from a touch-screen terminal. 490 / B offers a wide range of plasma etching capabilities, from deep etches on thick films to shallow etches on thin films. It can etch a variety of materials including metals, glasses, polymers and ceramics, making it versatile in a number of settings. LAM RESEARCH 490B also offers an optional low temperature plasma etcher (LTPE) which is useful for etching highly sensitive materials, or for processes where low temperatures are required. This model also provides improved etch uniformity with the addition of an internal mixer to uniformly mix the working gases around the substrate. LAM RESEARCH 490 / B can be used with a variety of popular etching chemicals, including carbon tetrafluoride (CF4), sulfur hexafluoride (SF6), oxygen (O2), argon (Ar), and chlorine (Cl2). 490B also features clean room compatibility, which makes it safe for use in sensitive areas. To ensure safety, the system is built with a variety of safety features, including two-way isolation, gas detection, cooling systems, and multiple safety interlocks. 490 / B is an essential tool for creating products with superior performance characteristics. Its advanced etching technology can produce precise etch patterns at high speeds, with an extremely high degree of repeatability. Its wide range of capabilities, user-friendly features, and safety features make LAM RESEARCH 490B an ideal etcher/ascher for numerous applications.
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