Used LAM RESEARCH 496B #9268074 for sale

LAM RESEARCH 496B is an etcher/asher that is used for the etching and ashing of monocrystalline as well as polycrystalline wafers. This platform is used to etch through various layers of film, such as photoresist, for pattern definition and for creating certain structures within layers of oxide. This type of etcher/asher employs electromagnetic waves to excite gaseous molecules within the reactor chamber, causing molecular breakdown and reaction, resulting in the etching or ashing process. 496B has a chamber made of stainless steel which is designed to be resistant to corrosion over time. The chamber is powered by a DC power source. This etcher/asher has been designed to offer precise, reliable and repeatable process results. The wafers are exposed to a range of fluorine-based chemicals within the chamber, resulting in an etching process that is highly selectable and can be tailored precisely to the needs of the particular substrate being processed. It also has a number of safety features including a built-in gas monitoring equipment and a safety interlock system. LAM RESEARCH 496B is capable of etching/ashing wafers up to 12 inches in diameter and can handle up to eight wafers per batch. It features an automatic wafer transfer unit that allows the wafers to be rapidly moved from the cassette to the etcher/asher and back again. The machine has a control computer with intuitive software that allows for customization of the etching/ashing parameters. This etcher/asher has been designed to provide maximum process flexibility and reproducibility with minimal waste and downtime. The tool has undergone extensive testing and validation to ensure process accuracy and reproducibility as well as safety standards. 496B delivers laboratory-grade accuracy and performance to ensure high yield and low cost of ownership.