Used LAM RESEARCH 580 #9268110 for sale

LAM RESEARCH 580 is an etcher / asher equipment designed to enable integrated circuit manufacturers to process etched and ashed layers in their fabrication process in a more efficient and accurate manner. This system is designed with the process nuance of advanced level inspection, etch, and ash technology to ensure high-quality production of applications in a large variety of industries. It offers an integrated unit capable of multiple process steps including lithography, etch, etchback, metrology, and ash. The machine has a large processing area of 330 mm x 330 mm and can accommodate a wide array of wafers, up to 500mm in diameter. 580 includes a feature-rich, efficient and accurate motion control capability and is powered by high-performance linear motor, which offer position, speed, and force control, allowing the best in both precision and reliability. An automated wafer alignment tool is also included, designed to improve precision and accuracy throughout the process. This asset also offers a variety of etch and ash chemistries to provide the maximum in process flexibility. In addition, LAM RESEARCH 580 features a number of proprietary recipes and process tools, such as OPC Pattern Processing, Arc Stripe-Specific Sources, and Position Error Correction. These tools contribute to better etch accuracy and throughput. The model also incorporates advanced metrology and inspection tools, such as state-of-the-art optical, capacitive and resistive sensors, to maximize wafer quality and minimize waste and rework. Furthermore, this equipment is equipped with a number of safety and environmental features including an internal chemical management system, inert gas gas purge, and a secure containment option. These features help ensure a safe and environmentally conscious operation. 580 is a reliable, feature-rich unit designed to meet the process requirements of various applications. It can provide a toolset of features and tools to enable lithography, etch, ash, and metrology process steps that are easy to use and affordable.