Used LAM RESEARCH 590 #293595902 for sale

LAM RESEARCH 590 etcher/asher is an advanced piece of equipment commonly used in semiconductor manufacturing. It is a chemical wet etching machine, capable of etching features from 1-2000 nanometers in width. The etching process is used to selectively remove material from a substrate, allowing the precise formation of patterned features on such substrates. 590 is equipped with a wide range of features to support etching and ashing. It has a dry etching chamber optimized for low etch rates, and dual-laser-microwave plasma etch technology enabling higher etch rates and superior film line-edge-roughness control. It also includes a highly configurable frontend and an integrated RF-bias module. To ensure high-quality etches it features an automatic pressure-side plasma control and a patented control equipment to optimize etch times. The stainless-steel wet etching chamber has a built-in electro-deposition module for metal etching jobs which maximizes selectivity. Additionally, the machine is able to support a range of process gases and pressure for the appropriate etching environment for various materials. It also has the air-cooled RF generator and a gas mixing panel for precise gas flow. LAM RESEARCH 590 offers advanced process control and monitoring capabilities with real-time process feedback. It features a powerful high-level computer control system which enables users to control and monitor all etching processes. The integrated unit includes secure high-speed communications as well as advanced safety systems including a vacuum test machine, safety interlocks and an etched gas delivery tool. 590 is an excellent machine for wafer etching and ashing. It offers superior results with a quick etch cycle time, making it a valuable asset in semiconductor fabrication. Its advanced features, robust design and ease of use makes LAM RESEARCH 590 a great choice for etching and ashing.