Used LAM RESEARCH 590 #293604251 for sale

Manufacturer
LAM RESEARCH
Model
590
ID: 293604251
Etcher.
LAM RESEARCH 590 is an advanced etcher/asher for the semiconductor manufacturing process. It is designed to deliver precise etching and ashing of extremely small features with extreme precision. The equipment integrates a unique feature set that provides repeatable, quality etching results with low down times. The system features a pair of vacuum-compatible, two-axis linear feeders that act as the substrates' stage. These feeders are used to adjust the rate of production and to accurately position substrates. 590 also has three high-performance manual/remote scan stages that provide precise planning of the etching. LAM RESEARCH 590's high-performance etching unit uses a mixture of Polysilicon Stripping, Silicon Wet Spray Cleaner, and Plasma Plus processes to remove materials from the substrates. The process features individually adjustable etching parameters and high rates of production. The machine also features a multi-station ash well that is used for eliminating unnecessary materials from the etched features. 590 offers unique features such as a Quartz-Tube Etch as well as a Self-Width Etch type. These modes provide the user with the capability to quickly and accurately produce complex patterns with minimal setup. LAM RESEARCH 590 also has a substrate alignment detection tool that is used to monitor and adjust the position of substrates during the etching process. The asset also allows the user to adjust rates of productivity while the etching is in progress. The model utilizes a High-Voltage Clamp technology which ensures the safety of personnel as well as the substrates during the etching. The equipment has a wide variety of different recipes that can be programmed by the user to achieve a desired etching results. These recipes can be downloaded from the manufacturer or developed by the user. Also, the system supports the use of custom-built scripts and algorithms that can reduce etching time and generate higher-quality results. In conclusion, 590 is a reliable, high-performance etcher/asher that is designed to deliver accurate, repeatable etching results. The unit has an array of powerful features that make it one of the most advanced systems for semiconductor manufacturing. It also has a user-friendly programming interface and powerful custom recipes that allow users to get the best possible results with the highest levels of safety, accuracy, and speed.
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