Used LAM RESEARCH 590 #9226290 for sale

LAM RESEARCH 590 is a state-of-the-art etcher/asher for applications in semiconductor processing. It is a fully automated equipment offering a high degree of process control dynamics, high throughput and exceptional repeatability of results. The system is designed around a modular platform, offering flexible configuration possibilities. This integrated platform offers industry-standard scalability of processing capabilities to the next level. 590 features a high-speed, high-density Plasma Source Module (PSM) that provides precise control over the plasma etch rate and utilization rate to optimize the processing of integrated circuits (ICs) and other devices. The PSM offers a choice of three independent channels for both inductively-coupled, and radio-frequency plasma sources. This unit also includes thermally-isolated substrate support, a high-density substrate heat exchanger, a multi-head voltage source, and an advanced real-time software control of all operations. LAM RESEARCH 590 also features advanced computer processor and software features, including process monitoring and control. This machine is designed to provide uniform, repeatable results and excellent long-term stability. To ensure excellent results, the tool features Automatic Focus Control (AFC) and Automatic Focus Resonance Mirrors (AFM). The AFC asset controls the beam position, while the AFM adjusts the etch rate to ensure optimum uniformity and repeatability. 590 is also equipped with an advanced Process Substrate Control and Monitoring (PSCM) Model, which offers integrated real-time control of all processing parameters. This equipment allows for comprehensive management, monitoring, and control of process parameters, including pressure, temperature, RF power, and gas utilization. The system is also fully compatible with industry-standard pattern definition, simulation, and optimization tools. LAM RESEARCH 590 also supports high-precision process recipes stored on the unit's hard drive for quick retrieval and easy setup. The machine is backed by LAM RESEARCH advanced tech support for quick and effective problem solving. This advanced support network ensures that customers get the most out of their etcher/asher and ensures continuous process optimization.