Used LAM RESEARCH 590 #9226293 for sale

LAM RESEARCH 590
Manufacturer
LAM RESEARCH
Model
590
ID: 9226293
Wafer Size: 6"
Vintage: 1990
Etcher, 6" 1990 vintage.
LAM RESEARCH 590 is one of the most advanced etchers and ashers available on the market today. This equipment is designed to effectively etch and/or asher small parts with utmost precision, allowing manufacturers to produce complex and accurate parts in a timelier manner. The system functions by using Cl2 or O2 plasma sources which create the required etching or ashing results with minimal damage to the parts. The unit provides several advantages over traditional etching and ashing methods. It can both etch and asher in the same run, drastically reducing downtime. The machine is also capable of pattern etching and ashing, in which the parts can be etched and/or ashed in a specific configuration. This creates parts with complex and accurate patterns, making them perfect for advanced applications such as microelectronic devices. The tool also includes a closed loop control asset that allows for optimal process performance and repeatability by monitoring and controlling time, pressure, flow, temperature and other process variables. The model is well equipped with an intuitive software equipment, allowing operators to quickly and easily customize the process and produce results according to the user's requirements. The system also offers exceptional flexibility, allowing users to choose from several job creation options, meaning parts can be etched or ashed with or without photoresists, and with or without patterning. 590 is designed to be easy to use and maintain, incorporating an easy-to-clean etching and loading chamber, as well as a pressurized cryotrap to protect the unit from contaminants. The machine can also be programmed with up to 30 different chamber recipes, making it suitable for producing a large variety of parts. Overall, LAM RESEARCH 590 is an exceptional etcher and asher that offers advanced features and capabilities which make it ideal for the modern manufacturing process. It is capable of producing complex, accurate shapes and patterns as well as offering users a wide variety of options for job creation and customization.
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