Used LAM RESEARCH 590 #9232890 for sale

LAM RESEARCH 590 is a high-performance etcher / asher designed for precision etching and ashing of a variety of materials including wafers, substrates, PCBs, metals and plastics. 590 is a fully automated equipment with a high-resolution monochromator and an advanced process control system. LAM RESEARCH 590 is designed for maximum throughput, with an easy to use multi-tiered pre-programming setup. 590 utilizes a small-footprint integrated subsystem with a simplified user interface for production with minimal operator intervention and reliable results. LAM RESEARCH 590 is a single-wafer processing platform capable of accommodating a wide range of substrate sizes. It is equipped with two plasma sources, two vacuum stages, and a multi-point sensor and sample platen with built-in temperature instrumentation. Additionally, 590 is equipped with an auxiliary gas delivery unit and offers a choice of process gases. The LAM LAM RESEARCH 590's advanced process control machine ensures high-precision etching and ashing on target surfaces. With its built-in PID adjustments, 590 is optimized to maintain tight control of the etch and ash parameters, including the ability to set up layer thicknesses with a tolerance of +/- 0.001 mm. Additionally, LAM RESEARCH 590 is capable of running low cycle time (up to 15000 wafers/hour) and high uniformity batch processes. The LAM 590 is designed for enhanced reliability and efficiency. It features a 24/7 maintenance schedule and is able to detect faults quickly and provide diagnosis for easy troubleshooting. Additionally, LAM RESEARCH 590 provides long-term data archiving capabilities, allowing users to check the status of their processes over time. 590 is designed to deliver maximum productivity, accuracy and operational efficiency. With its advanced process control and automated tool, it is well-suited for production requirements requiring precision etching and ashing. LAM RESEARCH 590 is a reliable solution for custom projects and large-scale batch production of microelectronic, opto-electronic, data storage and semiconductor devices.