Used LAM RESEARCH 690 #9151419 for sale

LAM RESEARCH 690 is a custom multi-chamber system with varied configuration options, providing advanced capabilities for etching and ashing needs. It is designed to precisely and cleanly etch/ash substrates in a multi-station process. 690 consists of a load lock chamber, a main etch chamber, and an adjustable-height product chamber. LAM RESEARCH 690's load lock chamber consists of a two-door configuration with two independent chambers, providing flexibility for loading and unloading delicate substrates. The load lock chamber is built to exacting specifications, to minimize outgas and enhance the accuracy of the overall system process. 690's main etch chamber is designed with adjustable parameters such as pressure, temperature, and gas delivery. This chamber provides the optimal environment for transistor etch and advanced materials deposition processes. LAM RESEARCH 690 has a dual gas delivery source, which provides accurate control of two gases at the same time, helping to ensure an even process across multiple substrates. In addition, 690 boasts a patented wafer taper control system, enabling precise and smooth adjustments of etch parameters in the event of process changes. LAM RESEARCH 690's adjustable-height product chamber ensures post-etch/ash operations can move up and down as needed for varied substrates. This chamber also contains an automated hot-stage plate, meaning that the target substrate remains in the same position inside the chamber as it is transferred from the main etch chamber. The automated plate also includes vacuum options which offer an efficient, tight seal on the substrate. Overall, 690 is a powerful etcher/asher built with precise specifications and adjustable parameters. Its load lock chamber, main etch chamber, and adjustable-height product chamber provides the ultimate platform for multiple substrates, delivering high-quality results consistently and on-time. An ideal tool for those seeking advanced control and flexibility for their etching and ashing needs.