Used LAM RESEARCH 690 #9238723 for sale

LAM RESEARCH 690 is an etcher/asher, designed for through-wafer plasma etching. It is often used in semiconductor fabrication processes, and is highly sought-after due to its ability to achieve excellent precision and throughput for advanced process steps. 690 features a multi-axis robotic arm equipped with an etching head, which has a fully programmable height and tilt movement. This allows the head to move through a complex set of coordinates, resulting in improved accuracy and uniformity of etching. The head has a wide angle of view, from 0-90 degrees, and is engineered for both planar and tilted films. The etching chamber is designed to provide optimum plasma density. It includes several features such as an internally focused shower head, which is responsible for creating a high-density plasma stream, and an electronically adjustable gas injection system which allows for accurate control of the etching process. LAM RESEARCH 690 also features advanced process control software, which allows for precise control of the etching process. This includes features such as process parameter optimization, auto-testing of gas supplies, real-time monitoring of etched layers, and automatic alerting of any process anomalies. This ensures that the process runs smoothly and efficiently. In addition, 690 also offers a wide range of accessories and features, such as interface boards, controllers, and probes. This allows for customizing the system for specific applications. The system is also very energy-efficient, with low total cost of ownership. Overall, LAM RESEARCH 690 has become an industry leader due to its wide variety of features, high accuracy, low cost of ownership, and excellent etching capabilities. It is an ideal choice for advanced processes steps in the semiconductor industry.