Used LAM RESEARCH 839-101612-883 #293664890 for sale

ID: 293664890
Electrostatic Chucks (ESC).
LAM RESEARCH 839-101612-883 etcher/asher is an advanced processing tool designed for electronic devices manufacturing. It is highly reliable and capable of performing various etching and ashing processes in a single chamber. The machine is also suitable for dielectric, SOG, or polyimide etching and ashing processes. Due to its efficient design, 839-101612-883 is able to perform flat wafer and activated wafer processes in a single processing chamber. The equipment is equipped with multiple power supplies with flexibility and stability that allows optimizing the process precisely and quickly with minimal downtime. LAM RESEARCH 839-101612-883 can perform etching and ashing processes in a safe and reliable manner thanks to its precise pressure and temperature control. The system is also capable of concentrating plasmas into narrow regions using a CCD camera, allowing overall better results for each process. The unit is also equipped with an automated loading/unloading machine for facilitating frequent substrate exchange. When it comes to maintenance, 839-101612-883 requires minimal effort. The tool features a self-diagnosis asset that monitors any problems and displays an error message if any issue arises. The machine also has a self-maintenance design that consists of self-cleaning processes for increased life and performance. Overall, LAM RESEARCH 839-101612-883 is an advanced etcher/asher that provides excellent performance and uptime reliability. It is suitable for various etching and ashing processes such as dielectric, SOG, or polyimide etching and ashing. It also features a precision control for temperature and pressure as well as an automated loading/unloading model to facilitate frequent substrate exchange. Finally, the equipment also offers self-diagnosis and self-maintenance designs for maximum reliability.
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