Used LAM RESEARCH 9400 DFM #9011879 for sale

LAM RESEARCH 9400 DFM is an advanced piece of etcher/asher technology used to create high-precision patterns with consistent results. Its design combines the benefits of lithography and etching/ashing technologies to deliver superior results with maximum productivity. The equipment is designed with features that streamline the process and yield results quickly and efficiently. 9400 DFM is a compact, but full-featured system with a closed-loop, robotic interface, high throughput and a wide range of process options. It features an advanced vertical lithography unit with stage-by-stage patterning and an enhanced field sputtering machine that can achieve nanometer-scale results with repeatable accuracy. Also included are planarization with selectable step height and a removable substrate chuck for easy transfer of materials into and out of the tool. LAM RESEARCH 9400 DFM offers a non-contact in-situ and post-process endpoint detection, with a range of optical monitors that measure thin film characteristics including thin film thickness, profile thickness and film composition. This ensures high precision and accuracy in all stages of etching/ashing. The asset can also be used for a variety of other processes, such as photolithography and dielectric hard masking applications. Apart from delivering good etching performance, 9400 DFM also offers reliable wireless communication using Ethernet, USB or TCP/IP protocols. This allows for quicker data transfer and automated results logging. Additionally, the model is easy to program and comes with a suite of software tools to enable users to customize processes for their specific requirements. LAM RESEARCH 9400 DFM is suitable for a wide range of industries, including electronics manufacturing, semiconductor packaging, medical device manufacturing, MEMs, and optical components. It is a reliable and efficient equipment that brings maximum productivity and dependable results to the semiconductor manufacturing industry.