Used LAM RESEARCH 9400 DFM #9181359 for sale

LAM RESEARCH 9400 DFM is an advanced Plasma Etcher/Asher that offers unmatched performance in a number of applications. It uses a highly precise time- and space-controlled ion etch process to achieve superior results in a wide range of etching tasks, and is capable of etching features down below 2.5 nanometers. 9400 DFM can be used for precision etching of wafers, filters, films, and other fine features with a high degree of exactness and accuracy. LAM RESEARCH 9400 DFM is equipped with two Exacting Ion Source (EIS) chambers, which are capable of providing both vacuum and atmosphere processing. It also uses a Dual-Mode CF (Carbon Fiber) technology that allows for superior CVD (Chemical Vapor Deposition) and etching performance. This is made possible through the combination of higher plasma densities and unique atomic contributions from the Carbon Fiber. The equipment is capable of etching a variety of materials and can be used for a wide range of applications. These include dielectric etching, hardmask etching, contact etching, via etching, and damascene etching. The etching results are highly repeatable and provides superior edge and oxide roughness for bevel and photoresist etching. The system also features a number of advanced control technologies to ensure the highest levels of chamber reproducibility. It uses an advanced RF bias control unit, which gives the machine superior control of ion energy and sputtering. It also includes an advanced automated tool called the Chamber Management Asset, which automates the operation of 9400 DFM, reducing operator error and increasing uptime and productivity. LAM RESEARCH 9400 DFM is an advanced etcher/asher for producing highly precise features and can be used in a wide range of applications. The model has a number of advanced control technologies to ensure repeatable etching results, and its Dual-Mode CF technology provides superior CVD and etching performance. It has become an industry leader in etching performance and is the etcher of choice for many companies in the semiconductor industry.