Used LAM RESEARCH 9400 DFM #9238153 for sale

LAM RESEARCH 9400 DFM (Deep Feature Etch and Asher) is a state-of-the-art etching and asher solution, designed to meet the rapidly changing demands of advanced semiconductor device fabrication. Highly capable, yet cost-effective, this robust etcher/asher allows for precise etching and surface cleaning of a wide variety of materials. 9400 DFM offers superior process reliability through a robust hardware configuration, including a proven robust PI/PID control and an advanced feed forward equipment that allows for precise process repeatability. The superior directional etch capability of LAM RESEARCH 9400 DFM also offers unparalleled process geometry and surface quality, and its ion beam-based etching delivers unmatched precision and control for a wide range of structures and geometries. 9400 DFM also includes a variety of advanced hardware features, including a fully automated safety shutdown system, multi-stage integrated thermal management environment, quick release support tools, and a fully integrated load-lock unit. This ensures that the process is safe and reliable, giving users confidence in high yield results and repeatable process performance. LAM RESEARCH 9400 DFM also features a number of optional add-on modules, such as an integrated particle trap, an anti-contamination shield, and post-etch non-contact imaging capabilities, allowing users to expand the machine's capabilities as their needs change over time. The advanced features and robust configuration of 9400 DFM make it the perfect choice for advanced semiconductor device fabrication applications. This etcher/asher is capable of tackling even the most complex process requirements with a combination of speed, precision, and reliable performance, allowing users to take their device fabrication to the next level.