Used LAM RESEARCH 9400 PTX #293767943 for sale

LAM RESEARCH 9400 PTX is an etcher/asher that offers solution-based deep plasma etching and ashing applications. It is designed to process the highest aspect ratio precision structures and deepest critical etching with a superior process repeatability. This enhances the fabrication process throughput and yields, as well as guaranteeing the best quality of materials. LAM RESEARCH 9400PTX offers a maximum throughput of over 500 wafers per hour, making it well suited for a wide range of high-volume manufacturing applications. This equipment is built to process single or multiple targets in a single chamber, allowing for increased flexibility and productivity. LAM RESEARCH 9400 PTXs advanced plasma chemistry includes a unique pulsed-plasma technology which provides a high degree of uniformity and repeatability and minimizes the amount of waste. The system's advanced process recipe development methods provide process control with accuracy of better than 0.5 μm. 9400 PTX also offers the highest uniformity and run-to-run repeatability in the industry. In addition, 9400PTX has an integrated chamber design that enables process stability and supports for wafer-level temperature control. Its precision wafer transport unit ensures accurate, repeatable motion with up to a 4-inch batch size. The machine's tool and recipe access is enabled by its onboard computer, which provides flexibility for the engineers, so that they are able to accurately and reliably process their product. The chamber's maintenance features, improved safety protocols, and a closed-loop process control should assist in reducing overall operational costs and make the most efficient use of the process gas. LAM RESEARCH 9400 PTX also boasts an intuitive platform that is easy to use and provides the user with complete control of the etch tool. It is also provided with data management software which allows users to easily export data for analysis and to store data for trending and multiple recipes. In sum, LAM RESEARCH 9400PTX etcher/asher offers unmatched process precision and repeatability for the precision deep etching and ashing of complex structures. Its advanced plasma chemistry and integrated chamber design makes it an ideal asset for a wide range of high-volume manufacturing. 9400 PTX is the superior choice for reliable and accurate etching and ashing processes.