Used LAM RESEARCH 9400 SE #9226497 for sale

LAM RESEARCH 9400 SE is a state-of-the-art etcher-asher equipment designed for a wide range of wafer processing applications. LAM RESEARCH 9400SE is a multi-chamber unit that provides superior wafer handling and repeatability for superior performance, making it one of the most reliable and versatile systems available. The core of 9400 SE is the wafer etch-ashers, which may feature a variety of options, such as Inductively-Coupled Plasma (ICP), Chemical-Mechanical Planarization (CMP) and Reactive Ion Etch (RIE). The standard components of 9400SE provide efficient and advanced etching and ashing capabilities over both alternating and single process cycles. Supporting the main etching/ashing modules are a variety of mechanisms that ensure exceptional wafer handling and safety. LAM RESEARCH 9400 SE has a three-axis wafer motion module, which enables accurate and repeatable wafer movements in X, Y, and Θ axes. The motion is driven by high-resolution stepper motors and controlled precisely by a closed-loop feedback system. The unit is also equipped with a load lock machine, enabling fast wafer loading and unloading. The internal pressure of the tool can be adjusted according to the application requirements. LAM RESEARCH 9400SE is designed with a wide range of safety features. This includes an integrated residual gas analyzer that monitors the etching/ashing process to minimize contamination and potential damage to the wafer and process chamber. The asset is also equipped with automated fault detection and repair systems that provide real-time fault detection and repair. Finally, 9400 SE is designed for cleanroom operation, featuring advanced electrostatic shielding materials that ensure a constant environment with low levels of ionizing radiation, EMF, and EMI. 9400SE meets the stringent safety requirements of all types of chip production processes, providing superior uniform etching and thermal uniformity at the wafer level. Thanks to its advanced features, high repeatability and uniformity, this model is ideal for a wide range of wafer etch-ash processes. With superior performance, reliability, and safety, LAM RESEARCH 9400 SE is a powerful wafer processing and production tool.