Used LAM RESEARCH 9400 SE #9230784 for sale

LAM RESEARCH 9400 SE is a highly advanced etcher / asher designed for use in semiconductor production. Its high uniformity and accuracy, coupled with its modular architecture, make it an ideal tool for critical etch applications. LAM RESEARCH 9400SE features two independent process chambers, configured in parallel platen design, allowing for concurrent processing of multiple substrates in various sizes. The platen can be adjusted manually or under program control to optimize etch uniformity across the entire substrate. 9400 SE also features LAM RESEARCH proprietary TO-DELTA™ technology, allowing for automatic, dynamic control of plasma to enhance etch uniformity, planarity and throughput. An intuitive user interface and embedded process monitoring capabilities ensure fast and repeatable etches. 9400SE utilizes a 20 micron focussed ion beam (FIB) technology for critical etch applications. By controlling ion and electron beams, etch profile and etch rate can be optimized. The FIB unit is also capable of implanting various ions into the substrate during the etch process. In addition, the multiple process chambers are all equipped with mass spectrometry capabilities, allowing the analysis of process gases throughout the etch process. LAM RESEARCH 9400 SE also includes an in-situ cleaning capability, which allows for easy and fast debris removal. The unit is also backed by a reliable electrical power supply, ensuring secure and consistent operation of the etcher/asher. The robust design of LAM RESEARCH 9400SE is further enhanced by its sophisticated cooling system, with effectiveness increasing in direct proportion to the number of substrates processed. 9400 SE brings groundbreaking's innovation in etch processing to the semiconductor industry. Its modular platform supports multiple etch applications providing a cost effective commercial solution. The high performance and efficiency are key features of the system, enabling consistent and repeatable etch results. All in all, 9400SE ensures the highest levels of dependability, offering reliable and repeatable etch processing.