Used LAM RESEARCH 9400 #293762518 for sale

LAM RESEARCH 9400 is an automated etcher and asher used for metal-organic chemical vapor deposition (MOCVD) processes. It is capable of batch or single-wafer processing at temperatures ranging from -20°C to 475°C. The equipment's capability of working at high temperatures allows for the deposition of high quality materials quickly and efficiently. The machine's large chamber enables processing of wafers up to 12" in diameter and up to 0.4" thick. 9400 is controlled by an advanced user-friendly system, with an ergonomic design that makes it easy to use. The unit is equipped with several safety features such as a gas monitoring machine and automatic venting. It uses a diffusion-bonded pumping chamber, which provides improved performance with the etching and ashing process. LAM RESEARCH 9400 is also equipped with advanced software modules to automate processes, optimize recipes, and provide real-time feedback. The tool makes use of a variety of etching and ashing chemistry mixes, including fluorocarbons, halocarbons, hydrocarbons, sulfur, and halogens. It is also capable of handling aseptic processes, enabling rapid testing and verification of product quality. The asset includes two or three process modules, depending on the customer's application. The first process module is the etcher, and it is used to deposit source gases, clean the wafer, and apply the desired etching and ashing process. Then, the second process module is the asher, and it removes any residue while also facilitating the removal of surface contaminants. Finally, the third module is the transporter, which transports and secures the wafer moving the wafer between the process modules. 9400 has several modes of operation, including dedicated etching and ashing, as well as combined etching/ashing or etching/compensation. Additionally, LAM RESEARCH 9400 includes sophisticated control and monitoring systems to monitor temperature, pressure, flow, and other operating parameters. Finally, the model is self-diagnosing to alert you of any problems and errors, providing valuable feedback in an effort to increase process efficiency and guarantee the highest quality results.