Used LAM RESEARCH 9400 #293776309 for sale

LAM RESEARCH 9400 is an industry leading high throughput batch etcher / asher, designed and manufactured to be highly reliable and robust for the most demanding production requirements. It features a compact, low-profile design, with a small footprint that optimizes performance in any manufacturing environment. The equipment is highly flexible, and is equipped with a range of custom options for high speed etching and wafer ashing. These include a selection of process chambers and pressure control panels, with up to three etchers / ashes per chamber, giving you maximum process capability in one system. It can be configured for a variety of process technologies, including photoresist removal, surface planarization, material etching and dielectric etches. The unit uses LAM's proprietary LatticePro™ advanced control software, which offers precise automation of etch and ash recipes, as well as advanced data collection and reporting capabilities. The software is supported by a range of recipe and process management tools, allowing you to quickly develop repeatable and reliable processes. The machine offers a variety of safety features, including safety switches, energy monitoring and emergency stop systems. The tool also uses vacuum interlocks to protect the process chamber and loadlock during operation, which helps to minimize risk and increase process fidelity. Additionally, the asset can be remotely monitored using the facility's Ethernet network. The model has been designed for maximum performance, with high throughput etchers / ashes and a choice of fast wafer heating systems for dopant activation and diffusion. Additionally, the equipment is designed for minimal maintenance, with optimized process chamber cleaning cycles and self-compensation of gas pressure and flow, making the system highly reliable and cost-effective. In summary, 9400 is a comprehensive and reliable etcher / asher that is tailored to meet even the most demanding production requirements. It offers high levels of performance, flexibility and cost efficiency, making it a highly attractive choice for any industrial manufacturing operation.