Used LAM RESEARCH 9400 #293814142 for sale

LAM RESEARCH 9400 is a leading edge etcher / asher from LAM RESEARCH. 9400 is a versatile and high-performance equipment, capable of processing all types of etching and ashing applications. Built upon the proven 9200 platform, LAM RESEARCH 9400 offers improved throughput capability by leveraging advanced multilayer automation, high-precision depth control, and advanced dual-chamber operation. It provides users with a robust and reliable platform for all types of etching and ashing applications. 9400 utilizes a dual-chamber design, with a process chamber and purge chamber, allowing for increased throughput. The system integrates automated multilayer control technology, making it ideal for a range of etching and ashing jobs. To control the etching and ashing process, LAM RESEARCH 9400 utilizes the LamShare software package, providing users with a highly intuitive interface for easy operation. Additionally, the unit features state of the art 3-axis positional accuracy, higher than industry standard, which allows for accurate and repeatable results. 9400 boasts outstanding temperature uniformity, with a stability rating of +/-0.25° C. This machine is compatible with the KOH, H3PO4, and XeF2 etchant chemistries. It is able to process any material, including both silicon and gallium arsenide. LAM RESEARCH 9400 also offers uniform etching rates and controlled layer force, helping to ensure consistent results. 9400 is an environmentally friendly tool and utilizes a zero pressure pump that helps to improve etching performance and reduce energy costs. LAM RESEARCH 9400 also features an advanced ultraviolet (UV) process control for enhanced etching accuracy, making it the perfect choice for manufacturing environments that requires a high degree of accuracy and performance. In addition to the advanced features of 9400, it also incorporates a range of safety features, such as a heated purge manifold, safety interlocks, manual emergency gas shutoff, and ETCHGUARD™ safety asset, which provides operators with additional peace of mind. LAM RESEARCH 9400 is an advanced etcher / asher suited to a wide variety of etching and ashing applications. It offers enhanced throughput capability, advanced 3-axis positional accuracy, highly uniform temperature control, and a wide range of safety features, making it the ideal choice for high performance etching and ashing jobs.