Used LAM RESEARCH 9400 #9154664 for sale

LAM RESEARCH 9400 is an Etcher/Asher designed and manufactured by LAM RESEARCH Corporation. It is used to etch and ash wafers in the semiconductor industry. 9400 is a fully automated system and includes a number of individual modules and components. It supports a wide range of substrate materials including silicon, carbon, copper, and aluminum. The system is available in both single-chamber and multi-chamber configurations for improved throughput for large scale production. It can also be customized with additional capabilities, such as integrated wet benches, to meet the customer's specific application needs. LAM RESEARCH 9400 has an integrated process controller to manage wafer height and temperature. It uses a variety of gas species in etching and ashing, such as Argon and Oxygen. It can operate in a single-phase or multi-phase mode, depending on customer requirements. It features automated wafer handling and can accommodate up to 5 wafers simultaneously. 9400 is designed for cleanroom use, and is designed to meet the most stringent ISO14001 standards. It can handle particles with a size of 0.1 microns. Additionally, it features redundant filtration and gas purification systems to minimize by-product and particle generation. LAM RESEARCH 9400 is designed for ease of use, featuring an intuitive command driven touchscreen graphical user interface. It also features user-defined protocols and can be programmed to automatically perform daily maintenance tasks. 9400 is a reliable and efficient tool for etching and ash processing. Its advanced automated system helps to ensure high yield and quality wafers, with consistent process results. Its built-in safety features ensure the safety of the operator and other personnel in the cleanroom.