Used LAM RESEARCH 9400 #9225455 for sale

LAM RESEARCH 9400 is a fully automated high-performance etch and asher equipment designed for high-precision etching and cleaning of semiconductor wafers. 9400 enables very fast process times and is ideal for high- throughput production. The system is built with a large volume horizontal chamber and quartz gas distributor plate which allows a uniform plasma distribution across the wafer surface. LAM RESEARCH 9400 also boasts an advanced RF matching network which provides the highest power efficiency and ensures optimal plasma uniformity. 9400 is designed to minimize the number of process variables and optimize etch throughput for deep etch and pattern transfer applications. This unit also utilizes a precision-controlled electrostatic chuck for auto-calibration and accurate wafer clamping. Its Pulsed Capacitive Coupled Plasma (PCCP) technology features a unique swept frequency active gas flow control machine to provide a stable, high-uniformity etch process over a number of wafer diameters. Plus, LAM RESEARCH 9400 utilizes in-situ monitoring and two stage input power control to ensure real-time process control and repeatability. The tool provides extraordinarily high plasma etch rates, uniformity, and repeatability for critical etch processes. Its advanced control loop monitoring and control strategies ensure accurate uniformity of the profile during etch, even for the most demanding process window. The asset is also highly scalable to accommodate the widest range of etching applications, from small research and development jobs to batch production processes. Overall, 9400 is an industry-leading etcher/asher model with advanced features and capabilities that enable manufacturers to achieve faster throughput, higher-quality products, and improved cost-efficiency. With its advanced control systems, in-situ monitoring, and precision-controlled electrostatic chuck, LAM RESEARCH 9400 is an excellent equipment for any semiconductor etching and cleaning needs.