Used LAM RESEARCH 9400 #9250094 for sale

LAM RESEARCH 9400
Manufacturer
LAM RESEARCH
Model
9400
ID: 9250094
Wafer Size: 6"
Poly etcher, 6".
LAM RESEARCH 9400 is an advanced etcher / asher equipment. It has been designed with cutting-edge technologies for optimal yield and throughput for wafer processing. It is a compact, high-throughput system that boasts a broad range of application-specific processes. 9400 is built on a scalable architecture that is designed to provide maximum control and flexibility. It is powered by a high-performance etch algorithm that is capable of meeting both high throughput and highest levels of accuracy. The unit can handle a wide range of etching parameters, with the ability to automatically adjust etch rates in order to keep process performance uniform across the wafer. LAM RESEARCH 9400 features a low-pressure, two-stage vertical plate etcher. This design eliminates the need for additional process chambers, allowing for a more compact machine. The tool also provides an advanced etch source, utilizing a box-out heater that delivers superior performance and yields. 9400 has a built-in process monitoring asset that ensures process and tool integrity throughout the process cycle. LAM RESEARCH 9400 also offers an atmospheric scanner that allows users to monitor and control the etching process across the wafer. With its advanced gas delivery model, 9400 can provide accurate and repeatable etch profiles. In addition, LAM RESEARCH 9400 ensures repeatable processes by incorporating layer-by-layer uniformity controls, including features like zone-by-zone nitride etching and adjustable current ramping. It is also equipped with advanced die-to-die monitoring, providing better process control for higher wafer yields. 9400 is a powerful etcher / asher equipment that is perfect for the demanding needs of today's leading semiconductor production technologies. Built from advanced materials and technologies, LAM RESEARCH 9400 is an ideal system for achieving high yield and throughput for wafer processing.
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