Used LAM RESEARCH 9400 #9250095 for sale

LAM RESEARCH 9400
Manufacturer
LAM RESEARCH
Model
9400
ID: 9250095
Wafer Size: 6"
Trench etcher, 6".
LAM RESEARCH 9400 is an advanced plasma etcher / asher designed to perform high-precision etching and depositing processes. It is an advanced equipment which supports multiple etching modes, allowing for high-precision etching with high selectivity and uniformity. It is exceptionally versatile, featuring numerous hardware and software configurations to match the specific etching requirements of individual projects. 9400 features a highly integrated control system, providing a user-friendly interface that simplifies the setup and operation of the etching process. The unit comes with a load lock chamber which allows the user to load and unload wafers easily, and a rotating substrate carrier that allows for multi-directional movement of the wafer. The combination of motorized height adjustment and fully programmable etch recipe control with the laser interferometer motion control gives the user precise control over etching performance. Process monitoring and control is made possible with a host of dedicated process sensors embedded directly into the machine. These sensors measure variables such as RF power, process chamber pressure, and wafer temperature. They help to ensure a consistent etching performance by providing feedback on process parameters and alerting the user of any unwanted gas or pressure Related anomalies. LAM RESEARCH 9400 also features advanced sensors to detect contamination within the tool. These sensors employ complex algorithms to detect potential material deposition and corrosive buildup, providing users with real-time data on the process environment and allowing them to address potential issues quickly. Overall, 9400 is a great etching tool for advanced precision etching (especially of materials like III-V, HfO2, and SiO2). It features a robust and integrated control asset, advanced monitoring and control features, and a load lock chamber that makes loading and unloading wafers simple. With the added durability and length of the etching process possible with this model, users can be sure their projects are in good hands.
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