Used LAM RESEARCH 9400 #9399063 for sale

LAM RESEARCH 9400 is an advanced-technology etcher/asher designed to meet the stringent requirements of the semiconductor industry. It is designed to offer maximum versatility and flexibility while delivering production-level ashing, etching and deposition processes. 9400 combines high-end performance and lower-cost operations, enabling customers to optimize their production operations to reduce cost, waste and downtime. LAM RESEARCH 9400 has a range of advanced technologies and capabilities to provide the highest performance and lowest cost of ownership. The ion beam current and energy precision is unmatched in the industry, making it the ideal choice for etching the most delicate and complex layer structures. The system utilizes several technologies and features such as automatic process control, real-time set-point adjustment and part identification to ensure accuracy and repeatability during processing. In addition, 9400 features LAM's proprietary high-temperature process-based flow controllers and direct-drive motors to optimize ashing, etching, and deposition speed, efficiency and cycle time. LAM RESEARCH 9400 includes an integrated gas cabinet for controlled gas distribution for rapid process recipe changes, as well as high throughput gas mixing capabilities. The system is designed to meet the most stringent requirements of the semiconductor industry with its automated Process Flow Controller (PFC), which maintains consistent etching, etching and deposition process conditions regardless of part size or recipe complexity. The system is designed to offer a robust and reliable process solution while reducing fab outgassing and excessive particle generation. The quick-change wafer-loading configurations ensure that production remains uninterrupted and the chambers are designed to provide easy access for maintenance and repair. 9400 is backed by LAM RESEARCH Comprehensive Process Support Program to ensure top performance and maximum return on investment.