Used LAM RESEARCH 9600 FEFG #9183635 for sale
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ID: 9183635
Vintage: 1998
Metal etcher
Software version: Version E1.5
CIM: Ok
Main chamber:
(1) Turbo pump 1000 litre with controller
(1) E-chuck
(1) TCP RF Match
(1) Bias RF match
(2) RF Generators
(1) CL2 MFC: 180 sccm
(1) BCL3 MFC: 50 sccm
(1) SF6 MFC: 200 sccm
(1) N2 MFC: 100 sccm
(1) O2 MFC: 250 sccm
(1) Ar MFC: 100 sccm
(1) He UPC: 50 sccm
Strip chamber:
(1) DSQ RF Match
(1) Heater paddle
(1) RF Generator
(1) Auto WVDS controller
(1) O2 MFC: 2000 sccm
(1) N2 MFC: 300 sccm
(1) H2O MFC With controller: 500 sccm
Rinse / Dry:
(1) Spin dryer with vacuum chuck
Transport:
(2) Integrated SMIF
(1) Wafer notch aligner with spatula
(2) Harmonic arm drive assemblies
Currently warehoused
1998 vintage.
LAM RESEARCH 9600 FEFG is a highly advanced etcher, which is designed for the production of both wafer and flat panel displays. It is an excellent choice for high-volume production and has a wide range of features which make it an ideal solution for any production line. 9600 FEFG is a high-precision etcher, providing precise etching of a wide variety of materials, including metals, semiconductors, and glasses. The tool is also capable of selective etching with varying depths and in very specific shapes. The tool is also designed to provide robust programmability and high throughput for optimal productivity. The key feature of LAM RESEARCH 9600 FEFG is its integrated motion control equipment. This system ensures continuous, flawless operation and superior performance, providing precision directional and positional control of the etching. The motion control unit also provides enhanced programmability, allowing for optimized operations and increased throughput. Additionally, the advanced optics of the tool, coupled with the integrated laser, ensures that etcher lines are accurately and uniformly etched. The laser can be configured to etch in different patterns, depending on the application. The laser also provides a highly detailed image of where the line is being etched, allowing for the accurate measurement of depths and the precise identification of fine line intervals. In terms of safety, 9600 FEFG offers advanced protection measures, including emergency stop functionality and motion control machine lockout. This ensures that the tool can be operated safely and without excessive risk. Additionally, the tool features a highly intuitive touchscreen interface which allows for the easy and seamless control of the etcher. The interface also displays a detailed visual representation of the etching process, allowing operators to correlate the visual image with the etch profile. LAM RESEARCH 9600 FEFG is a powerful and reliable tool that is well suited for the production of wafers and flat panel displays. It offers precision control, easily programmability, robust safety features, and a highly intuitive interface. This makes 9600 FEFG an excellent choice for any production line.
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