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Marketplace
Etchers / Ashers
LAM RESEARCH
9600 SE
#293752314
Used LAM RESEARCH 9600 SE #293752314 for sale
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Etchers / Ashers
Manufacturer
LAM RESEARCH
Model
9600 SE
Equipment Details
Reviews
ID:
293752314
Wafer Size:
6"
Etcher, 6" Robot type: Shuttle film Molecular sieve Gases: CL2, BCL3, O2, HE, SF6, N2, CF4 (2) Chambers: Used for etching and glue remover Missing parts: Load / unload index End point detector.
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