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Etchers / Ashers
LAM RESEARCH
9600 SE
#293758675
Used LAM RESEARCH 9600 SE #293758675 for sale
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Etchers / Ashers
Manufacturer
LAM RESEARCH
Model
9600 SE
Equipment Details
Reviews
ID:
293758675
Wafer Size:
6"
Metal etcher, 6" Robot type: Shuttle film Molecular sieve Process gases: CL2, BCL3, O2, HE, SF6, N2, CF4 (2) Chambers: Used for etching and glue remover.
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