Used LAM RESEARCH 9600 #199858 for sale
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ID: 199858
Wafer Size: 8"
TCP metal etch system, 8"
Can be converted to 6"
Mounting: bulkhead
Software: Envision 1.52
Indexers: HINE
AC box: -001
Gas box: orbital welded
Clamping: ESC
Backside helium: closed loop
Generator: 3 RFG 1250
RF match: upper TCP, lower mini match, DSQ match
Turbo: SEKO SEKI 1000L
Turbo controller SEKI SEKI STP
VAT gate: VAT 65
VAT controller: PM-7
Endpoint: dual endpoint 703nm and 520nm
DSQ: hinged
WVDS: auto fill
APM: standard
MFCs: unit 1660
Gas config:
Gas 1: CL2 200
Gas 2: BCL3 100
Gas 3: SF6 100
Gas 4: N2 50
Gas 5: N2 1000
Gas 6: Ar 1000
Gas 7: O2 1000
Gas 8: CF4 200
Gas 9: H20 500.
LAM RESEARCH 9600 is a high-performance etcher / asher equipment designed to provide superior performance and reliability in a variety of industrial manufacturing applications. The system features integrated 1- or 2-gas capability and advanced temperature control, enabling users to accurately etch or ash materials at the precise level desired. This can be advantageous for precision applications such as thin-film deposition, semiconductor device manufacturing, thin-film packaging and photomask fabrication. 9600 also features low noise levels, a numeric window-based controller, and onboard diagnostics, making it ideal for automated manufacturing processes. The easy-to-use user interface allows users to easily access parameters and make adjustments on the fly with just the touch of a finger. The unit also features high performance RF plasma sources, allowing users to achieve superior etch rates and uniformity. LAM RESEARCH 9600 also features advanced control systems, including temperature sensors and process uniformity controllers, allowing users to easily adjust process parameters and precisely monitor their progress. Its intelligent gas delivery machine helps achieve higher levels of process uniformity and consistency. Additional features include a universal liner for precise etch rates and uniformity, advanced power supply and controller, modular construction for ease of maintenance, a push-button gas starter, greater throughput and yield, and optional LAM RESEARCH fleet management. To protect against possible contamination, 9600 boasts a fully automatic high-efficiency recirculating exhaust, which helps capture particulate matter and prevents it from entering the etching chamber. This helps ensure quality and consistent etching results. Overall, LAM RESEARCH 9600 is an effective, reliable, and efficient etcher / asher, perfect for industrial manufacturing applications. With its advanced features and capabilities, it ensures superior performance and reliability, helping businesses increase their productivity and efficiency.
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