Used LAM RESEARCH 9600 #293822608 for sale

LAM RESEARCH 9600 is a plasma-enhanced chemical vapor deposition etcher / asher designed to produce high quality, high throughput etching and ashing of both small and large substrates. This advanced etcher / asher is designed to handle a wide variety of substrate materials and processes with improved process repeatability. 9600 is designed with a patented uniform design to ensure even distribution of gases across the entire wafer surface. It also features a dual-sided gas delivery system that provides more precision and control over the etching and ashing processes. This etcher / asher features dual-decoupled end-point technology, which provides a higher level of control of etch depth, rate and selectivity than single-ended systems. LAM RESEARCH 9600 also has a higher wafer-to-averaging power density ratio for higher availability and lower power consumption, along with higher throughput. 9600 is designed with the addition of a remote plasma source to enable the etch process over a variety of flexible process parameters. The remote plasma source is integrated into the etcher / asher, allowing users to tune the process parameters in real time. These process parameters include etch rates, selectivity, and overetch/ undercut. The integration also allows for faster cycle times by eliminating the need for an additional source of plasma. LAM RESEARCH 9600 is equipped with a multi-zone arrayed motor positioner for precise motion control and repeatability. This ensures that the wafer moves in the same uniform manner for each etch / ash cycle. The positioner also provides motion control for other aspects of the processing cycle, including gate valve and shutter movements. 9600 is designed with an integrated process monitoring and diagnostics system to provide real-time feedback on process performance. This feedback is then used to ensure optimal results and minimize equipment downtime. The integrated tool also features a variety of features such as event logging and error detection. LAM RESEARCH 9600 is designed with a range of optional peripheral components, such as load locks and chilled gas distributors. These components allow users to further customize the process and improve process performance. Additional features of the etcher / asher include an anti-stiction system, a fast open time and a wide-range of process temperatures. Overall, 9600 is an advanced etcher / asher designed to provide superior quality with improved process repeatability. It is built with high-performance components and features, along with a range of optional peripherals and advanced process monitoring capabilities, to offer users with outstanding etching and ashing performance.