Used LAM RESEARCH 9600 #9186503 for sale

LAM RESEARCH 9600
Manufacturer
LAM RESEARCH
Model
9600
ID: 9186503
Wafer Size: 6"
Metal etcher, 6".
LAM RESEARCH 9600 is an advanced etcher/aspher designed to facilitate high-precision etching and ashing processes. 9600 is capable of etching virtually any material, and utilizes a modular chamber design to maximize uptime and process flexibility. It is equipped with multiple source and sink modules, allowing for precise, high-throughput etching and ashing processes, as well as depth profiling of up to 75 μm etching thickness and low-energy ashing of less than 2 nm. The advanced cycle computer and powerful software suite provides full control and precise results, and is easy to configure for precise cycling and process optimization. LAM RESEARCH 9600's advanced vacuum monitoring and control system ensures precise etching and ashing conditions, with low particle emissions, maintaining both the chamber and the wafer environment clean for maximum yield. It also has an optional Load Lock that allows for full integration with other equipment for maximum flexibility. 9600 is automated for easy operation and control, as well as interface with a wide range of user interfaces and programmable devices. Overall, LAM RESEARCH 9600 provides a reliable, accurate, and high-precision etching/ashing solution to meet the needs of semiconductor, packaging, and display industries.
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