Used LAM RESEARCH 9600 #9204380 for sale

LAM RESEARCH 9600 is an etcher/asher that is designed to process both wafers and substrates with specialist materials. This machine can be customized to tailor an application to different process requirements. It is produced by LAM RESEARCH, a global provider of process applications that innovate, simplify and optimize the production of semiconductor integrated circuits. 9600 offers flexibility, leading edge performance and low processing costs. It is a multi-chamber system that enables different processing steps to take place in each chamber. This allows a wide range of processes to be carried out and makes the machine highly versatile. LAM RESEARCH 9600 also offers high throughput and uniformity, with a very low operating temperature, reducing particle contamination and increasing product yields. 9600 has a source lid, substrate table, variable process chamber, and exhaust systems. The source lid includes a grid plate and shutter mechanisms, for efficient loading and unloading of substrates. The substrate table is designed for stability and repeatability, and can feature multiple process chambers. The variable process chamber is designed to allow the user to adjust processing conditions from the controller. It features a motorized lift and has a door to the loadlock chamber for loading and unloading of substrates. The exhaust system is designed for efficient pump down and clean up of effluents, including fluorine and chlorine. LAM RESEARCH 9600 can be customized to process substrates from a 3-inch to an 8-inch wafer size, with a capacity of up to 24 substrates. It is an automated system, featuring robot arm mechanisms, dual robots and substrate sorting. 9600 has a computer-controlled interface that allows monitoring of the status of the module, process recipe editing and adjustment, and plotting of various process graph parameters. It also includes silicon carbide, quartz and alumina processing capabilities. Overall, LAM RESEARCH 9600 is a high-quality etcher/ asher that provides an economical solution for processes that require precision and controlled environments. It is highly automated and its capability to tailor process conditions make it an ideal choice for many applications.