Used LAM RESEARCH 9600 #9210314 for sale

LAM RESEARCH 9600 is a state-of-the-art etcher/asher for semiconductor processing. It utilizes both wet and dry etch processes, allowing the user to choose which is most appropriate for their application. With its powerful, yet energy-efficient pulsed power equipment, it is capable of handling a wide range of substrates including silicon, gallium arsenide and other III-V compounds. Its automatic loading and unloading system ensures consistent process results and improves throughput. 9600 combines a reliable, high-power power source, a precision-kine controller for precise process control, and independent temperature and pressure monitoring for accurate delivery. This results in tight process tolerances and repeatable results. The integrated interface is user-friendly, allowing users to create and store multiple process recipes. LAM RESEARCH 9600 provides additional benefits such as flexibility in the chamber size, with a choice of 3.2, 5.3 or 7.7 inch diameters. This allows users to select the optimal tool size for the application, saving on both time and cost. With a broad range of chamber pressures and temperatures, the unit can handle many different depositing and etching applications. 9600 also features advanced safety features, such as integrated emergency shut-off switches and a low-flow alarm for leak detection. Additionally, An optional base vacuum module facilitates fast and seamless substrate loading and unloading, as well as process offset corrections. These features combined with LAM RESEARCH 9600's robust architecture and performance guarantee maximum process throughput and repeatable performance. 9600 is a versatile and reliable etcher/asher for many semiconductor-processing applications. With its powerful and energy-efficient pulsed power machine, wide range of chamber sizes, temperature and pressure settings, and advanced safety features, LAM RESEARCH 9600 ensures reliable process results and optimized throughput.