Used LAM RESEARCH 9600 #9233030 for sale

The LAM LAM RESEARCH 9600 is an etcher/asher that offers the ultimate in flexibility and performance for advanced processing technology. This equipment is ideal for applications from wafer manufacturing to disk drive product development. It is an integrated etcher/asher that uses a dual-beam modular process chamber to enable reliable and efficient processing of any pattern. The LAM 9600 features a state-of-the-art process chamber that provides a uniform etching depth and accurate materials handling, giving users the power to etch or asher any substrate. This highly advanced chamber allows for maximum process control and overall system flexibility. The LAM LAM RESEARCH 9600 process module has integrated advanced processes such as inductively-coupled plasma (ICP), reactive-ion etching (RIE), and electrochemical etching (ECE). These processes enable high-quality wafer etching with low contamination and improved process stability. The integrated dielectric reaction chamber provides plasma power control and uniform etching depths, and is suitable for a variety of etching and ashing tasks. 9600 is equipped with a step-and-repeat unit for rapid RF output control. Its software includes multiple source control parameters, automated real-time dynamic gas control, high-accuracy virtual temperature control, and a sophisticated process control mapping machine. By combining these features, the tool provides both accurate and repeatable etching performance. In addition, the asset offers optical and acoustical diagnostics capabilities. The integrated optical model provides continuous monitoring of the etching and ashing process, while the acoustical equipment provides non-destructive testing of the etching pattern to detect any faults or weaknesses. The LAM LAM RESEARCH 9600 can be configured for various applications, including metal oxide etching, high-aspect-ratio etching, and metal line patterning. The system can process a variety of substrates that include crystalline silicon, thin film materials, and quantum dots. The unit is also available with a number of optional packages, such as an ion source and an optional automated sample handling machine. With its flexible process chamber, comprehensive control tool, and advanced diagnostics capabilities, the LAM 9600 is a complete and cost-effective solution for advanced etch/ashing applications. It offers maximum process control, uniform etching depths, and reliable materials handling to ensure high-performance and cost-effective processing.