Used LAM RESEARCH 9600 #9242599 for sale

LAM RESEARCH 9600 is an advanced platform for etching and ashing semiconductor wafers. This equipment is composed of a load lock, process chamber, and an exhaust system, and provides unparalleled tools and accuracy. The load lock is a vacuum-sealed chamber that allows semiconductor wafers to be safely loaded in a contaminant-free manner. A robot mechanism is used to move the wafers from the load lock to the process chamber. The robot mechanism uses advanced mechanical principles to ensure proper wafer handling, security and accuracy. The load lock can be configured for a variety of transports, based on the type of wafer being processed. The process chamber is a highly application-specific environment. This is where the etch or ash process is conducted depending on the specific requirements of the application. The chamber is designed and constructed for precision, accuracy and repeatability, enabling reliable and repeatable results for each etched or ashed wafer. The exhaust unit is used to evacuate spent material and produce uniform process conditions. The exhaust machine utilizes a combination of chemical etching, adsorption, filtration and gases to remove particulate and other types of contaminants from the tool. The cyclone separator is typically used to collect and remove particulate matter. 9600 is an outstanding etching and ashing asset. It is constructed to provide consistent and accurate processes. Its sophisticated combination of components, load lock, process chamber and exhaust model, results in enhanced accuracy, cost savings and robust performance. This makes LAM RESEARCH 9600 an outstanding and reliable choice for semiconductor etching and ashing wafers.