Used LAM RESEARCH 9600 #9243611 for sale

LAM RESEARCH 9600 is a high-precision etcher / asher equipment designed for etching, passivating, and cleaning of semiconductor wafers and substrates in the fabrication of integrated circuits. This system is equipped with a wide range of features that enable precise materials-processing operations of outstanding fundamental accuracy, including support for multistage processes and software systems optimized for wafer-level data analysis and traceability. 9600 can process substrates of up to 6" (up to 1.5 μm thick) with dramatic in-structure resolution and repeatability. An integrated microprocessor-regulated gas control and dispensing unit provides precise control of machine parameters and precise chemical delivery. This tool offers unmatched capabilities when it comes to precise chemical delivery, precise masking operations, and state-of-the-art wafer-level data analysis. LAM RESEARCH 9600 is designed for the most technologically advanced semiconductor materials processing applications. It supports automated chemical delivery, precise and repeatable temperature control, precise and controlled chemical temperature, precise and controlled gas pressures, and precise and controlled power output. This etcher / asher asset is equipped with a number of unique features, including an ultra-high-precision dual-head gas delivery model, a highly accurate automatic alignment equipment, and a variety of patented and advanced etching, passivating, and cleaning recipes developed specifically for 9600. In order to provide accurate and repeatable results, LAM RESEARCH 9600 incorporates a sophisticated and integrated microprocessor-controlled operation system, which automatically adapts to various recipes and process conditions. The internal gas flow control unit and high-precision metering machine combine to provide precise control of etching, passivating and cleaning operations. 9600 also provides advanced software systems for data logging and advanced quality data analysis. This tool is optimized for auto-aligning, tracking, and advanced quality control of substrate lithography. In addition to the out-of-the-box features, LAM RESEARCH 9600 also offers custom install options and advanced maintenance packages, including real-time process control and data analysis capabilities. 9600 is a reliable, versatile and cost-effective solution for advanced materials processing operations. Its combination of high-precision gas delivery and advanced software systems provide a highly reliable asset that is capable of delivering reliable and repeatable results in a wide range of process conditions.